PZT thin film deposition on Si wafers and optical fibers prepared by reactive DC pulsed magnetron sputtering from a single metallic target-Reference-Cited by-同舟云学术

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PZT thin film deposition on Si wafers and optical fibers prepared by reactive DC pulsed magnetron sputtering from a single metallic target

Published:2005-10 Issue:1-4 Volume:200 Page:1051-1056
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Thapliyal R.,Schwaller P.,Amberg M.,Haug F.J.,Fortunato G.,Hegemann D.,Hug H.J.,Fischer A.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference18 articles.

1. Ferroelectric Memories

2. PZT thin films for microsensors and actuators: Where do we stand?

3. DWI Report Aachen;Karayanni,2003

4. Effect of excess Pb and O content on the ferroelectric properties of sputter deposited Pb(Zr 0.52 Ti 0.48 )O 3 /Pt system

5. Highly oriented lead zirconium titanate thin films: Growth, control of texture, and its effect on dielectric properties

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Synthesis of PbTiO3Thin Films by Annealing Multilayer Oxide Structures in Vacuum;Acta Physica Polonica A;2016-01

2. Comparison of Al2O3nano-overlays deposited with magnetron sputtering and atomic layer deposition on optical fibers for sensing purposes;SPIE Proceedings;2013-12-07

3. PZT thin film preparation by pulsed DC magnetron sputtering;Vacuum;2009-02

4. Processing, Structure, Properties, and Applications of PZT Thin Films;Critical Reviews in Solid State and Materials Sciences;2007-12-04

5. Rapid depth profiling of lead zirconate titanate (PZT) thin films by pulsed glow-discharge optical emission spectroscopy;Surface and Interface Analysis;2006

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