Superhard nanocomposite Ti–Si–C–N coatings prepared by pulsed-d.c plasma enhanced CVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference24 articles.
1. Influence of process parameters on the growth of TiN in different sized plasma-assisted chemical vapor deposition reactors
2. Investigation of PA-CVD of TiN: Relations between process parameters, spectroscopic measurements and layer properties
3. Plasma CVD: process capabilities and economic aspects
4. Hard coatings produced by PACVD applied to aluminium die casting
5. TiAlN and TiAlCN deposition in an industrial PaCVD-plant
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2. Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge;Membranes;2022-03-12
3. Investigation of the plasma composition of a discharge with a self-heating hollow cathode and an active anode in a gas mixture with titanium and hexamethyldisilazane vapors;Journal of Physics: Conference Series;2021-11-01
4. Obtaining of TiSiCN coatings by anodic evaporation of titanium and decomposition of hexamethyldisilazane in a low-pressure arc discharge;Journal of Physics: Conference Series;2021-06-01
5. Toughening of nanocomposite hard coatings;REVIEWS ON ADVANCED MATERIALS SCIENCE;2020-01-01
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