Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS

Author:

Souček Pavel,Hnilica Jaroslav,Klein Peter,Fekete Matej,Vašina Petr

Funder

Ministerstvo Školství, Mládeže a Tělovýchovy

Grantová Agentura České Republiky

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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3. D. Lundin, M. Tiberiu, J. T. Gudmundsson (Eds.), High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications, 1st ed., Elsevier, Amsterdam, 2019.

4. J. Gudmundsson, Physics and technology of magnetron sputtering discharges, Plasma Sources Sci. T. 29 (2020) 113001. doi:https://doi.org/10.1088/1361-6595/abb7bd.

5. Ionized physical vapor deposition (IPVD): a review of technology and applications;Helmersson;Thin Solid Films,2006

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