The effect of annealing atmosphere on photoluminescent properties of SiCN films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference20 articles.
1. Growth competition between crystalline silicon carbon nitrides and silicon nitrides deposited on Si wafer by MPCVD
2. Forming silicon carbon nitride crystals and silicon carbon nitride nanotubes by microwave plasma-enhanced chemical vapor deposition
3. Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition
4. Influence of deposition condition and hydrogen on amorphous-to-polycrystalline SiCN films
5. Wide band gap silicon carbon nitride films deposited by electron cyclotron resonance plasma chemical vapor deposition
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