Morphology and preferred orientation of Y2O3 film prepared by high-speed laser CVD
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
1. Structural properties of Y2O3 thin films grown on Si(100) and Si(111) substrates
2. Microstructural Control of Y2O3 Coating on Quartz Glass for the Reduced Thermal Mismatch Stress
3. High Speed Deposition of Y2O3 Films by Laser-Assisted Chemical Vapor Deposition
4. Structure of vapor-deposited yttria and zirconia thin films
5. Micro/macro modeling of CVD synthesis
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