Numerical simulation of magnetic field enhanced plasma immersion ion implantation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Handbook of Plasma Immersion Ion Implantation and Deposition;Wood,2000
2. Key issues in plasma-source ion implantation
3. Stable plasma configurations in a cylindrical magnetron discharge
4. Current–voltage characteristics of a substrate in a crossed E×B field system exposed to plasma flux from vacuum arc plasma sources
5. Application of particle-in-cell simulation to plasma source ion implantation
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1. On the generation of magnetic field enhanced microwave plasma line;Physics of Plasmas;2016-12
2. Dynamics of magnetized plasma sheaths around a trench;Physics of Plasmas;2016-08
3. Magnetized plasma sheath with two positive ions where collision frequencies have a power law dependency on ions velocities;Journal of Theoretical and Applied Physics;2015-09-07
4. Plasma immersion ion implantation characteristics with q-nonextensive electron velocity distribution;Journal of Plasma Physics;2015-01-20
5. Ion dynamics in plasma sheath under the effect of E×B and collisional forces;Vacuum;2009-11
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