A study on the flexibility of the hot-filament configuration and its implementation for diamond, boron carbide and ternary alloys deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Growth of high quality silicon carbide films by bias enhanced low-pressure HFCVD using methane
2. Optical properties of silicon nitride films deposited by hot filament chemical vapor deposition
3. Filament activated chemical vapor deposition of boron carbide coatings
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