Preferred orientation, phase transition and hardness for sputtered zirconium nitride films grown at different substrate biases-Reference-Cited by-同舟云学术

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Preferred orientation, phase transition and hardness for sputtered zirconium nitride films grown at different substrate biases

Published:2011-01 Issue:8-9 Volume:205 Page:2865-2870
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Meng Q.N.,Wen M.,Qu C.Q.,Hu C.Q.,Zheng W.T.

Funder

National Natural Science Foundation of China

MOE

“211” and “985” project of Jilin University, China

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference53 articles.

1. Evaluation of the wear resistance of ZrN coatings using thin layer activation

2. Influence of substrate bias on practical adhesion, toughness, and roughness of reactive dc-sputtered zirconium nitride films

3. Tribological behaviour and mechanical properties of physical-vapour-deposited hard coatings: TiNx, ZrNx, TiCx, TiCx/i-C

4. Friction and wear behavior of titanium nitride, zirconium nitride and chromium nitride coatings at elevated temperatures

5. Variation of color in titanium and zirconium nitride decorative thin films

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5. Reactive flash sintering of TiZrN and TiAlN ternary metal nitrides;Journal of the European Ceramic Society;2024-04

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