Plasma polymerized hexamethyl disiloxane in adhesion applications
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference20 articles.
1. Deposition of SiO2by Plasma Enhanced Chemical Vapor Deposition as the Diffusion Barrier to Polymer Substrates
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3. Mechanisms Involved in the Conversion of ppHMDSO Films into SiO2-Like by Oxygen Plasma Treatment
4. Comparison of structure and mechanical properties of SiO2-like films deposited in O2/HMDSO pulsed and continuous plasmas
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