Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering-Reference-Cited by-同舟云学术

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Composition and mechanical properties of AlC, AlN and AlCN thin films obtained by r.f. magnetron sputtering

Published:2009-03 Issue:13 Volume:203 Page:1904-1907
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Yate L.,Caicedo J.C.,Macias A. Hurtado,Espinoza-Beltrán F.J.,Zambrano G.,Muñoz-Saldaña J.,Prieto P.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference32 articles.

1. The structure of the aluminum carbonitrides. II

2. Effects of a molecular beam epitaxy grown AlN passivation layer on AlGaN/GaN heterojunction field effect transistors

3. AlN thin films grown by ion-beam-enhanced deposition and its application to SOI materials

4. Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications

5. The hardnesses and elastic moduli of pulsed laser deposited multilayer AlN/TiN thin films

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