Non-heat assistance chemical vapor deposition of amorphous silicon carbide using monomethylsilane gas under argon plasma
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
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4. Room temperature and reduced pressure chemical vapor deposition of silicon carbide on various materials surface;Habuka;Adv. Chem. Eng. Sci.,2014
5. Semiconductor Devices;Sze,2002
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