Low temperature fabrication of indium-tin oxide film by using ionized physical vapor deposition method-Reference-Cited by-同舟云学术

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Low temperature fabrication of indium-tin oxide film by using ionized physical vapor deposition method

Published:2015-03 Issue: Volume:266 Page:10-13
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Cheong Woo-Seok,Hong Chan-Hwa,Shin Jae-Heon,Kim Kyung-Hyun,Park Nae-Man,You Shin-Jae,Kim Jung-Hyung,Kim Yeong-Shin

Funder

R&D project of MOTIE/KEIT

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference15 articles.

1. Effects of heat treatment on properties of ITO films prepared by rf magnetron sputtering

2. Characterization of rf-sputtered indium tin oxide thin films

3. Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings

4. Microstructures of ITO films deposited by d.c. magnetron sputtering with H2O introduction

5. Characterization of CuCl nanocrystals in SiO[sub 2] matrix fabricated by inductively coupled plasma-assisted sputtering deposition

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1. A layer-by-layer green inkjet printing methodology for developing indium tin oxide (ITO)-based transparent and conductive nanofilms;Journal of Cleaner Production;2022-12

2. Effects of proton beam irradiation on the physical and chemical properties of IGTO thin films with different thicknesses for thin-film transistor applications;Surfaces and Interfaces;2021-04

3. High Power Impulse Magnetron Sputtering of In2O3/Sn Cold Sprayed Composite Target;Materials;2021-03-05

4. Atomic Layer Deposition of Indium‐Tin‐Oxide as Multifunctional Coatings on V 2 O 5 Thin‐Film Model Electrode for Lithium‐Ion Batteries;Advanced Materials Interfaces;2020-10-13

5. Effect of Inductively Coupled Plasma on Multilayer Electrodes for Flexible Single-Layer Touch Screen Panels;ACS Applied Materials & Interfaces;2019-06-25

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