Deposition rate enhancement in HiPIMS through the control of magnetic field and pulse configuration
Author:
Funder
National Partnerships Program
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference40 articles.
1. High power impulse magnetron sputtering discharge;Gudmundsson;J. Vac. Sci. Technol. A,2012
2. Copper thin films deposited under different power delivery modes and magnetron configurations: a comparative study;Velicu;Surf. Coat. Technol.,2017
3. On the film density using high power impulse magnetron sputtering;Samuelsson;Surf. Coat. Technol.,2010
4. High power impulse magnetron sputtering discharges and thin film growth: a brief review;Helmersson,2005
5. Deposition rate enhancement in HiPIMS without compromising the ionized fraction of the deposition flux;Capek;J. Phys. D. Appl. Phys.,2013
Cited by 45 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Tuning chemical composition and structural properties of bismuth ferrite based thin films by reactive bipolar HiPIMS;Ceramics International;2024-09
2. A Review of CIGS Thin Film Semiconductor Deposition via Sputtering and Thermal Evaporation for Solar Cell Applications;Coatings;2024-08-24
3. Deuterium retention in tungsten co-deposits with neon and argon inclusions;Nuclear Materials and Energy;2024-06
4. Using a coupled optical and electrical monitoring method to follow the R-HiPIMS TiO2 deposition process drifts;Physica Scripta;2024-03-27
5. Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction;Plasma Sources Science and Technology;2023-12-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3