Relationship between mechanical properties and chemical groups in a-C:F films prepared by RF unbalanced magnetron sputter deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference12 articles.
1. Co-deposition of titanium/polytetrafluoroethylene films by unbalanced magnetron sputtering
2. Fluorocarbon and tungsten carbide multilayer coatings
3. Electrical and adhesion properties of plasma-polymerised ultra-low k dielectric films with high thermal stability
4. The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing
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