Author:
Gobbert Matthias K.,Cale Timothy S.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Transport Simulation in Microelectronics, vol. 3, Progress in Numerical Simulation for Microelectronics;Kersch,1995
2. Modeling of Chemical Vapor Deposition of Tungsten Films, vol. 2, Progress in Numerical Simulation for Microelectronics;Kleijn,1993
3. Topography simulation for the virtual wafer fab
4. Ballistic transport‐reaction prediction of film conformality in tetraethoxysilane O2 plasma enhanced deposition of silicon dioxide
5. The Boltzmann Equation and Its Applications, vol. 67, Applied Mathematical Sciences;Cercignani,1988
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献