Author:
Ikenaga Noriaki,Miyamoto Kouhei,Hayashi Shintaro,Kishi Yoichi,Yajima Zenjiro,Sakudo Noriyuki
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference4 articles.
1. N. Ikenaga: Dr. Thesis, “Development of plasma controlling technique by pulse-modulating RF power and its applications to processes for forming highly functional films”, Kanazawa Institute of Technology, Ishikawa, 2008
2. Effect of electron temperature on the DLC film properties
3. Microwave ion sources for industrial applications (invited)