Microwave ion sources for industrial applications (invited)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150376
Reference14 articles.
1. NEW HIGH INTENSITY ION SOURCE WITH VERY LOW EXTRACTION VOLTAGE
2. Production of Large Area High Current Ion Beams
3. Electron Cyclotron Resonance Multiply Charged Ion Sources
4. The evolution of ion sources for implanters (invited)
5. The Production of Intense Ion Beams in a Mass Spectrometer
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