Influence of hydrogen content and sputtering characteristics on the properties of ZnO:Al transparent conductive layers deposited on polymer substrate
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference18 articles.
1. Optical and electrical properties of R.F. magnetron sputtered ZnO:Al thin films
2. Preparation of transparent conducting ZnO:Al films on polymer substrates by r. f. magnetron sputtering
3. Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic properties
4. Thickness dependence of structural, optical and electrical properties of ZnO:Al films prepared on flexible substrates
5. Bias voltage dependence of properties for ZnO:Al films deposited on flexible substrate
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Improving photoelectric perfomance with hydrogen on Al-doped ZnO;Materials Chemistry and Physics;2022-11
2. Effect of the base pressure achieved prior deposition on the main properties of ZnO:Al films obtained by DC magnetron sputtering at room temperature for electrical contact use;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-03
3. Defects generated by MF magnetron sputtering and their influences on the electrical and optical properties of Al doped ZnO thin films;Applied Surface Science;2015-10
4. Investigation of low resistance transparent F-doped SnO2/Cu bi-layer films for flexible electronics;Vacuum;2014-04
5. The Influence of Hydrogen on the Properties of Zinc Sulfide Thin Films Deposited by Magnetron Sputtering;International Journal of Photoenergy;2014
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