Affiliation:
1. College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China
Abstract
Zinc sulfide thin films have been deposited with hydrogen in Ar and Ar+H2atmosphere by radio frequency magnetron sputtering. The thickness, structural properties, composition, surface morphology, and optical and electrical properties of the films have been investigated. Effect of hydrogen on the properties of the film was studied. The results showed that hydrogen leads to better crystallinity and larger crystallite size of ZnS polycrystalline films. The band gaps of the films in Ar+H2are about 3.48 eV compared with 3.24 eV without hydrogen. It is also demonstrated that hydrogen can result in a better stoichiometric composition of the films.
Funder
National Program on Key Basic Research Project (973 Program)
Subject
General Materials Science,Renewable Energy, Sustainability and the Environment,Atomic and Molecular Physics, and Optics,General Chemistry
Cited by
11 articles.
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