Author:
Eichentopf Inga-Maria,Böhm Georg,Arnold Thomas
Funder
German Ministry of Education and Science
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Dry etching of β‐SiC in CF4 and CF4+O2 mixtures
2. Comparison of dry etch chemistries for SiC
3. Precision Science and Technology for Perfect Surfaces, Proc. of the 9th ICP, Osaka;Boehm,1999
4. Optical Fabrication & Testing OSA Technical Digest;Boehm,2000
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