Nano-scale residual stress depth profiling in Cu/W nano-multilayers as a function of magnetron sputtering pressure
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference31 articles.
1. Probing the deformation and fracture properties of Cu/W nano-multilayers by in situ SEM and synchrotron XRD strain microscopy;Brandt;Surf. Coat. Technol.,2017
2. Deposition and structure of W-Cu multilayer coatings by magnetron sputtering;Wang;J. Phys. D. Appl. Phys.,2003
3. Controlled biaxial deformation of nanostructured W/Cu thin films studied by X-ray diffraction;Djaziri;Surf. Coatings Technol.,2010
4. X-ray diffraction analysis of the structure and residual stresses of W/Cu multilayers;Girault;Surf. Coatings Technol.,2006
5. Investigation of the effect of residual stress gradient on the wear behavior of PVD thin films;Tlili;J. Mater. Eng. Perform.,2018
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