Lowering the resistivity of aluminum doped zinc oxide thin films by controlling the self-bias during RF magnetron sputtering
Author:
Funder
Innovation Fund Denmark
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference38 articles.
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5. Transparent conducting oxide semiconductors for transparent electrodes;Minami;Semicond. Sci. Technol.,2005
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