Highly conductive and transparent ITO films deposited at low temperatures by pulsed DC magnetron sputtering from ceramic and metallic rotary targets
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference21 articles.
1. ITO revisited: a study of coating properties obtained with sintered ceramic rotary targets aiming at display applications;Lippens,2011
2. Amorphous indium tin oxide films deposited on flexible substrates by facing target sputtering at room temperature;Xiao;Thin Solid Films,2014
3. Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature;Shin;J. Appl. Phys.,2001
4. Influence of substrate temperature on the properties of indium oxide thin films;Adurodija;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film,2000
5. Rapid thermal annealing of ITO films;Song;Appl. Surf. Sci.,2011
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