The study on the welded rate of bonding ZnO rotary target
Author:
Funder
Natural Science Foundation of Ningbo
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference24 articles.
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2. Direct writing of metal film via sputtering of micromachined electrodes;Abdul-Wahed;J. Mater. Process. Technol.,2018
3. Evolution of microstructure of IGZO ceramic target during magnetron sputtering;Liu;Ceram. Int.,2021
4. Highly conductive and transparent ITO films deposited at low temperatures by pulsed DC magnetron sputtering from ceramic and metallic rotary targets;David;Surf. Coating. Technol.,2017
5. Indium–tin-oxide coatings for applications in photovoltaics and displays deposited using rotary ceramic targets: recent insights regarding process stability and doping level;Lippens;Thin Solid Films,2013
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