Plasma characteristics and target erosion profile of racetrack-shaped RF magnetron plasma with weak rubber magnets for full circular target utilization-Reference-Cited by-同舟云学术

Plasma characteristics and target erosion profile of racetrack-shaped RF magnetron plasma with weak rubber magnets for full circular target utilization

Published:2016-12 Issue: Volume:307 Page:1134-1138
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Ohtsu Yasunori^ORCID,Tsuruta Shohei,Tabaru Tatsuo,Akiyama Morito

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference32 articles.

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