Author:
Kukli Kaupo,Salmi Emma,Jõgiaas Taivo,Zabels Roberts,Schuisky Mikael,Westlinder Jörgen,Mizohata Kenichiro,Ritala Mikko,Leskelä Markku
Funder
Finnish Centre of Excellence in Atomic Layer Deposition
Estonian Ministry of Science and Education
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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