Magnetron sputtering process for homogeneous internal coating of hollow cylinders
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference15 articles.
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1. Design and Analysis of a New Excitation Structure for Magnetron Sputtering;IEEE Access;2024
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3. Improvement of plasma uniformity and mechanical properties of Cr films deposited on the inner surface of a tube by an auxiliary anode near the tube tail;Plasma Science and Technology;2022-05-01
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5. Hard titanium nitride coating deposition inside narrow tubes using pulsed DC PECVD processes;Surface and Coatings Technology;2019-11
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