Determination of intrinsic stresses in textured and epitaxial TiN thin films deposited by dual ion beam sputtering
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference23 articles.
1. Structure and properties of TiN coatings
2. The state of residual stress in TiN films made by physical vapor deposition methods; the state of the art
3. Internal stress and adherence of titanium nitride coatings
4. Intrinsic stress in sputter-deposited thin films
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4. Structure, phase stability and elastic properties in the Ti1–xZrxN thin-film system: Experimental and computational studies;Acta Materialia;2012-09
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