Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
63 articles.
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1. Analysis of stress in sputter-deposited films using a kinetic model for Cu, Ni, Co, Cr, Mo, W;Applied Surface Science;2023-03
2. Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling;Surface and Coatings Technology;2022-10
3. Analysis of Stress in Sputter-Deposited Films Using a Kinetic Model for Cu, Ni, Co, Cr, Mo, W;SSRN Electronic Journal;2022
4. Understanding residual stress in thin films: Analyzing wafer curvature measurements for Ag, Cu, Ni, Fe, Ti, and Cr with a kinetic model;Journal of Applied Physics;2021-10-07
5. Effect of plasma interface treatment on the microstructure, residual stress profile, and mechanical properties of PVD TiN coatings on Ti-6Al-4V substrates;Surface and Coatings Technology;2021-05