Plasma deposition of hydrogenated diamond-like carbon films from CH4-Ar mixtures
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference14 articles.
1. Diamond-like carbon: state of the art
2. Diamond-like amorphous carbon
3. Optical emission spectroscopy for diagnostic and monitoring of CH4plasmas used for a-C:H deposition
4. Influence of dc bias voltage on the refractive index and stress of carbon‐diamond films deposited from a CH4/Ar rf plasma
5. Optical studies of hydrogenated amorphous carbon plasma deposition
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