Author:
de Monteynard Alexis,Schuster Frédéric,Billard Alain,Sanchette Frédéric
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference27 articles.
1. Scaling of hollow cathode magnetrons for ionized metal physical vapor deposition;Vyas;J. Vac. Sci. Technol. A,2006
2. Hollow cathode magnetron;Wang;J. Vac. Sci. Technol. A,1999
3. Ionization fraction of the sputtered metal flux in a hollow cathode magnetron;Tsar'Gorodtsev;Plasma Phys. Rep.,2014
4. Reactive deposition of nitrides and oxides using a twin-cathode inverted cylindrical magnetron;Lindberg;Surf. Coat. Technol.,2000
5. Hollow cathode discharges: Volt-ampere characteristics and space-time resolved structure of the discharge;Marić;J. Phys. Conf. Ser.,2009
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