Reactive deposition of nitrides and oxides using a twin-cathode inverted cylindrical magnetron-Reference-Cited by-同舟云学术

Reactive deposition of nitrides and oxides using a twin-cathode inverted cylindrical magnetron

Published:2000-11 Issue: Volume:133-134 Page:484-488
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Lindberg V.W,Woodard A.R,Glocker D.A

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference10 articles.

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3. D.E. Siegfried, D. Cook, D. Glocker, American Society of Vacuum Coaters’ Annual Technical Conference, Philadelphia, PA 1996, American Society of Vacuum Coaters, Albuquerque 1996, p. 97.

4. Reactive direct current magnetron sputtering of aluminum oxide coatings

5. D.A. Glocker, American Society of Vacuum Coaters’ Annual Technical Conference, Chicago, IL 1999, American Society of Vacuum Coaters, Albuquerque, 1999, p. 871.

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