An experimental study on the adhesion at a nano-contact-Reference-Cited by-同舟云学术

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An experimental study on the adhesion at a nano-contact

Published:2003-07 Issue:10 Volume:254 Page:974-980
ISSN:0043-1648
Container-title:Wear
language:en
Short-container-title:Wear

Author:

Yoon Eui-Sung,Yang Seung Ho,Han Hung-Gu,Kong Hosung

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics

Reference15 articles.

1. Silicon as a mechanical material;Peterson;Proc. IEEE,1982

2. Surface engineering and microtribology for microelectro-mechanical systems;Komvopoulos;Wear,1996

3. Surface processes in MEMS technology;Maboudian;Surf. Sci. Rep.,1998

4. Self-assembled monolayers as anti-stiction coatings for MEMS;Maboudian;Sens. Actuators A,2000

5. Adhesion and friction issues associated with reliable operation of MEMS;Maboudian;MRS Bull.,1998

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