Assessing environmental impacts of nanoscale semi-conductor manufacturing from the life cycle assessment perspective

Author:

Kuo Tsai-ChiORCID,Kuo Chien-Yun,Chen Liang-Wei

Funder

Republic of China Ministry of Science and Technology

Publisher

Elsevier BV

Subject

Economics and Econometrics,Waste Management and Disposal

Reference43 articles.

1. Life Cycle Assessment in Semiconductor Foundry;Ahmad,2007

2. Life cycle assessment of integrated circuit packaging technologies;Adrae;Int. J. Life Cycle Assess.,2011

3. Midpoints versus endpoints: the sacrifices and benefits;Bare;Int. J. Life Cycle Assess.,2000

4. Mineral resources in life cycle impact assessment: part II– recommendations on application-dependent use of existing methods and on future method development needs;Berger;Int. J. Life Cycle Assess.,2020

5. Life-Cycle Assessment of Semiconductors;Boyd,2012

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