A high-current low-emittance dc ECR proton source
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference11 articles.
1. ECRIS: The Electron Cyclotron Resonance Ion Sources
2. Microwave ion source for ion implantation
3. A high‐current density and long lifetime ECR source for oxygen implanters
4. Emittance and matching of ECR sources
5. Multiple-aperture extractor design for producing intense ion and neutral beams
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