A precision linear actuator using piezoelectrically driven friction force
Author:
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
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3. Ultrasonic linear motor using a multilayered piezoelectric actuator;Uchino;Ferroelectrics,1988
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5. Linear type ultrasonic motor using two dimensionally positioned piezoelectric elements;Endo;Ferroelectrics,1990
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