Development of a compact impact two-degree-of-freedom linear-rotary piezoelectric motor using one piezoelectric actuator

Abstract

A compact impact two-degree-of-freedom linear-rotary piezoelectric motor is proposed using a single actuator. The proposed piezoelectric actuator has a pair of deformation counteracting helical interdigitated electrodes on its outside surface, which can be divided into two parts. When the two parts of the piezoelectric actuator are driving under the same driving voltage signals, the motor can realize independent linear motion. When the two parts of the piezoelectric actuator are driving under the driving voltage signals with opposite duty cycles, the motor can realize independent rotary motion. The fabricated piezoelectric motor can produce a maximum average linear velocity of 1.9 and −2.3 mm/s with a saw-shaped driving signal of 400 Vp-p (peak-to-peak driving voltage) at 9 kHz. Experiments also show that the fabricated piezoelectric motor can realize a maximum average rotary velocity of 2440 and −2235 mrad/s with a driving signal of 400 Vp-p at 9 kHz. The maximum load force and torque of the prototype are about 0.4 N and 1.5 mN m, respectively. The proposed motor provides a wide driving frequency and realizes high velocity in both linear and rotary motions.