Effect of frequency on low temperature synthesis of diamond by pulsed discharge MPCVD

Author:

Zeng YiORCID,Sakamoto Yukihiro

Publisher

Elsevier BV

Subject

General Materials Science

Reference23 articles.

1. CVD diamond films: from growth to applications[J];Gicquel;Curr. Appl. Phys.,2001

2. Handbook of Industrial Diamonds and Diamond films[M],2018

3. Effects of the electric field at the edge of a substrate to deposit a Ø100 mm uniform diamond film in a 2.45 GHz MPCVD system[J];Kang;Plasma Sci. Technol.,2022

4. Diamond as the heat spreader for the thermal dissipation of GaN-based electronic devices[J];Sang;Functional Diamond,2022

5. Kunuku S, Ficek M, Wieloszynska A, et al. Growth of B/N co-doped CVD grown homo epitaxial diamond films: optical and electrical properties[J] . Dear Participants, 134.

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