Author:
Isobe Y.,Shirakawa H.,Son P.,Miyake M.
Cited by
3 articles.
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1. Chemical vapour deposition of coatings;Progress in Materials Science;2003
2. The CVD of Metals;Handbook of Chemical Vapor Deposition (CVD);1999
3. THE CVD OF METALS;Handbook of Chemical Vapor Deposition;1992