1. Green, M.L. and Levy, R.A., CVD of W and Al for VLSI Applications, Proc. 5th European Conf. on CVD (J. O. Carlsson and J. Lindstrom, Eds.), 441–447, Uppsala Univ., Sweden (1985)
2. Aluminum Coatings by the Decomposition of Alkyls;Pierson;Thin Solid Films,1977
3. Chemically Deposited Metals;Powell,1966
4. Vacuum UV Driven CVD of Localized Aluminum Thin Films;Calloway;J. Vac. Sci. Technol.,1983
5. Patterned Photonucleation of CVD of Aluminum by UV Laser Photodeposition;Tsao;Appl. Phys. Lett.,1984