1. Energy efficiency in California laboratory-type facilities;Mills;Lawrence Berkeley national laboratory report,1996
2. Innovation efficiency of semiconductor industry in China: a new framework based on generalized three-stage DEA analysis;Li;Socio-Econ Plan Sci,2018
3. Cleanroom energy benchmarking results;Tschudi;ASHRAE Trans,2003
4. Energy efficient design and control of cleanroom environment control systems in subtropical regions – a comparative analysis and on-site validation;Shan;Appl Energy,2017
5. Efficient airflow design for cleanrooms improves business bottom lines;Xu,2003