Self-calibration of precision angle sensor and polygon mirror-Reference-Cited by-同舟云学术

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Self-calibration of precision angle sensor and polygon mirror

Published:1997-08 Issue:4 Volume:21 Page:125-136
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Kiyono Satoshi,Zhang Shizhou,Uda Yutaka

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference9 articles.

1. Foundations of Mechanical Accuracy;Moore,1970

2. Program and performance for international comparison of angle standards;Toyota;Bulletin of the National Research Laboratory and Metrology, Japan,1988

3. Elements of Modern Optical Design;O'Shea,1985

4. Optical Polygons for Angle Standards, B 7432;JIS Committee,1985

5. High precision optical surface sensor;Kohno;Applied Optics,1988

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Calibration of a Rotary Encoder and a Polygon Using a Two-Autocollimator Method;Applied Sciences;2023-01-31

2. A Self-Calibration Method of Microbolometer With Vacuum Package;IEEE Sensors Journal;2020-08-01

3. High-speed time-domain characterization method for polygon scanners;Measurement;2019-03

4. Recent developments in nanoradian-angle metrology;Advances in Metrology for X-Ray and EUV Optics VII;2017-09-07

5. Optical Instrumentation for Machine Calibration;Machine Tool Metrology;2016

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