1. Precision Mechanical Metrology Research Laboratory, Center for Measurement Standards, Industrial Technology Research Institute, 321, Sec. 2, Kuang Fu Rd., Hsinchu 30011, Taiwan
2. Dimensional Standards Group, Research Institute for Engineering Measurement, National Institute of Advanced Industrial Science and Technology, Cyuou-dai-3, Umezono 1-1-1, Tsukuba 305-8563, Japan