Multivariable feedback control design for high-precision wafer stage motion

Author:

van de Wal Marc,van Baars Gregor,Sperling Frank,Bosgra Okko

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Reference31 articles.

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2. Weighting function selection in the H∞ design process;Beaven;Control Engineering Practice,1996

3. Ceton, C., Wortelboer, P. M. R., & Bosgra, O. H. (1993). Frequency weighted closed-loop balanced reduction. In Proceedings of the second European control conference, Vol. 2, Groningen, The Netherlands (pp. 697–701).

4. State-space solutions to standard H2 and H∞ control problems;Doyle;IEEE Transactions on Automatic Control,1989

5. A four-block problem for H∞ design: Properties and applications;Englehart;Automatica,1991

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