Author:
Chang In-Soung,Kim Jae-Hyung
Subject
Industrial and Manufacturing Engineering,Strategy and Management,General Environmental Science,Renewable Energy, Sustainability and the Environment
Reference13 articles.
1. Waste generation and minimization in semiconductor industry;Gilles;J. Environ. Eng.,1994
2. Liquid-phase processing of hydrophilic features on a silicon wafer;Olim;J. Electrochem. Soc.,1997
3. Advanced wet and dry cleaning coming together for next generation;Heyns;Solid State Technol.,1998
4. Critical drying technology for deep submicron processes;Wang;Solid State Technol.,1998
5. Effects of drying methods and wettability of silicon on the formation of water marks in semiconductor processing;Park;J. Electrochem. Soc.,1995
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献