Evaluation of micro-replication technology using silicone rubber molds and its applications

Author:

Chung Sungil,Im Yonggwan,Kim Hoyoun,Jeong Haedo,Dornfeld David A

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference13 articles.

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2. Characterization of the polymerization of SU-8 photoresist and its applications in MEMS;Zhang;Polymer Testing,2001

3. Microfabrication: LIGA-X and applications;Kupka;Applied Surface Science,2000

4. A manufacturing technique for 3D polymer micro-venturi tube;Chen;International Journal of Machine Tools and Manufacture,2003

5. Micromilling development and applications for microfabrication;Friedrich;Microelectronic Engineering,1997

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