Materials issues in microelectromechanical systems (MEMS)-Reference-Cited by-同舟云学术

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Materials issues in microelectromechanical systems (MEMS)

Published:2000-01 Issue:1 Volume:48 Page:179-196
ISSN:1359-6454
Container-title:Acta Materialia
language:en
Short-container-title:Acta Materialia

Author:

Spearing S.M

Publisher

Elsevier BV

Subject

Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference122 articles.

1. Microfabricated electrostatic actuators for hard disk drives

2. Macro Power from Micro Machinery

3. Srinivasan, R., Firebaugh, S. L., Hsing, I.-M., Ryley, J., Harold, M. P., Jensen, K. F. and Schmidt, M. A., Proceedings, Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, June 1997, pp. 163–166.

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