Author:
Xin Lei,Dou Jiantai,Yang Zhongming,Liu Zhaojun
Funder
National Natural Science Foundation of China
Key Technology Research and Development Program of Shandong
Fundamental Research Fund of Shandong University
Subject
General Physics and Astronomy
Reference26 articles.
1. White light interferometry;James,2002
2. Multifunction optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry;Tapilouw;Adv Opt Technol,2014
3. Broadband light source shearing interferometer using savart plate and angular scanning technique;Lin;Opt Lett,2012
4. Measurement of static and vibrating microsystems using microscopic TV holography;Paul Kumar;OPTIK,2011
5. Design, assembly and calibration of white-light microscopy interferometer;Wang;SPIE,2015
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献