Author:
Stadler A,Sulima T,Schulze J,Fink C,Kottantharayil A,Hansch W,Baumgärtner H,Eisele I,Lerch W
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Lerch W et al. Wet rapid thermal oxidation of silicon with a pyrogenic system. Materials Science & Engineering B 1998
2. Tunnel current in n-poly-Si/SiO2/n-Si structures with the 40-75A thermally grown silicon oxide films under very strong fields;Balev;Applied Surface Science,1993
3. Characterisation of ultrathin SiO2 films grown by rapid thermal oxidation;Hu;J. Vac. Sci. Technol. B,1997
4. Hirose M et al. Current transport and reliability issues in ultrathin gate oxides
5. Boron diffusion and penetration in ultrathin oxide with poly-Si gate;Cao;IEEE Electron Device Letters,1998
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