Thermal oxidation of silicon in the ultrathin regime
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Thermal Oxidation of Silicon in Dry Oxygen: Accurate Determination of the Kinetic Rate Constants
2. Thermal Oxidation of Silicon in Dry Oxygen Growth‐Rate Enhancement in the Thin Regime: I . Experimental Results
3. Thermal Oxidation of Silicon in Dry Oxygen: Growth‐Rate Enhancement in the Thin Regime: II . Physical Mechanisms
4. Silicon Oxidation Studies: Silicon Orientation Effects on Thermal Oxidation
5. Analytical relationship for the oxidation of silicon in dry oxygen in the thin‐film regime
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